{"product_id":"plasma-etching-an-introduction-plasma-materials-interactions-9780124693708","title":"Plasma Etching: An Introduction (Plasma : Materials Interactions)","description":"\u003cdiv class=\"book-description\"\u003e\n\u003cp\u003e\u003cstrong\u003ePlasma Etching: An Introduction (Plasma : Materials Interactions)\u003c\/strong\u003e by Manos, Dennis M.. hardcover edition. ISBN: 9780124693708.\u003c\/p\u003e\n\u003cp\u003ePlasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.\u003c\/p\u003e\n\u003c\/div\u003e","brand":"Academic Press","offers":[{"title":"Default Title","offer_id":44990078976053,"sku":"ByrdShop_0124693709","price":317.1,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0627\/8139\/0901\/files\/9780124693708_f3df7377-2297-4899-b3a3-8446f0900c3e.jpg?v=1778916678","url":"https:\/\/atxbooks.com\/products\/plasma-etching-an-introduction-plasma-materials-interactions-9780124693708","provider":"ATX Books","version":"1.0","type":"link"}