{"product_id":"semiconductor-manufacturing-technology-9780130815200","title":"Semiconductor Manufacturing Technology","description":"\u003cp\u003eIn this book  Quirk and Serda introduce the terminology  concepts  processes  products  and equipment commonly used in the manufacture of ultra large scale integrated (ULSI) semiconductors. The book provides helpful  up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and equipment technology found in wafer fabrications. Topics include copper interconnect; dual damascene additive process for metallization; deep UV sub-micron photolithography (.18 micron and below); low-k dielectric processing; chemical mechanical planarization; a comprehensive model of manufacturing process; chemical-mechanical polish (CMP); and maintenance and troubleshooting. For practicing semiconductor manufacturing technicians or those interested in semiconductor manufacturing technology and processes.\u003c\/p\u003e","brand":"My Store","offers":[{"title":"Default Title","offer_id":45280110837813,"sku":"ByrdShop_0130815209","price":256.9,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0627\/8139\/0901\/files\/9780130815200.jpg?v=1780621217","url":"https:\/\/atxbooks.com\/products\/semiconductor-manufacturing-technology-9780130815200","provider":"ATX Books","version":"1.0","type":"link"}