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A User's Guide to Vacuum Technology

hardcover – April 24, 1989
by O'Hanlon, John F.
$59.39 USD
$59.39 USD
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ISBN-13: 9780471812425 ISBN-10: 0471812420
Publisher
Wiley-Blackwell
Binding
hardcover
Published
April 24, 1989
Weight
1.8 lbs
Dimensions
23.90×2.90×16.10 cm

About this book

A User's Guide to Vacuum Technology by O'Hanlon, John F.. hardcover edition. ISBN: 9780471812425.

An introduction to the theory and practice of modern vacuum technology, with applications. Focuses on the understanding, operation, and selection of equipment for vacuum processes used in semiconductor, optical, and related technologies. This 2nd Edition has new information on components, lubrication, pump fluids, and other materials. Basic characteristics and operational procedures are given for each high-vacuum pumping system.