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Fabrication Engineering at the Micro- and Nanoscale (The Oxford Series in Electrical and Computer Engineering)

Paperback – November 15, 2012
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ISBN-13: 9780199861224 ISBN-10: 0199861226
Publisher
Oxford University Press, USA
Binding
Paperback
Published
November 15, 2012
Weight
2.4 lbs
Dimensions
23.40×19.10×3.30 cm

About this book

Fabrication Engineering at the Micro- and Nanoscale (The Oxford Series in Electrical and Computer Engineering) by Campbell, Stephen A.. Paperback edition. ISBN: 9780199861224.

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.