Home › Glow Discharge Processes: Sputtering and Plasma Etching
1 1

Glow Discharge Processes: Sputtering and Plasma Etching

hardcover – September 25, 1980
by Chapman, Brian
$119.57 USD
$119.57 USD
Sale Sold out
Shipping calculated at checkout.
Secure Checkout
Quality Guaranteed
New In Stock
ISBN-13: 9780471078289 ISBN-10: 047107828X
Publisher
Wiley
Binding
hardcover
Published
September 25, 1980
Weight
1.8 lbs
Dimensions
24.00×3.30×16.30 cm

About this book

Glow Discharge Processes: Sputtering and Plasma Etching by Chapman, Brian. hardcover edition. ISBN: 9780471078289.

Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.