Micromachined Transducers Sourcebook
hardcover
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February 1, 1998
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ISBN-13: 9780072907223
ISBN-10: 0072907223
About this book
Micromachined Transducers Sourcebook by Kovacs, Gregory T.. hardcover edition. ISBN: 9780072907223.
This is the first textbook to provide a comprehensive overview of the field, beginning with micromachining approaches and then covering all major categories of transduction. The book takes a practical approach to the subject and studies key design issues by examining the fabrication of different devices.
