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Microsensors: Principles and Applications

paperbackSeptember 6, 1994
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ISBN-13: 9780471941361 ISBN-10: 0471941360
Publisher
Wiley-Blackwell
Binding
paperback
Published
September 6, 1994
Weight
1.4 lbs
Dimensions
24.40×1.90×16.70 cm

About this book

Microsensors: Principles and Applications by Gardner, Julian W.. paperback edition. ISBN: 9780471941361.

The main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. Following a chapter on basic signal processing, the book concentrates on microsensors—the processing of materials for their fabrication; the wide range of physical, chemical and mechanical principles employed and the benefits incurred from the application of smart sensors and microsensor array devices. Features numerous examples.