Semiconductor Devices: Physics and Technology
hardcover
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September 25, 2001
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ISBN-13: 9780471333722
ISBN-10: 0471333727
About this book
Semiconductor Devices: Physics and Technology by Sze, Simon M.. hardcover edition. ISBN: 9780471333722.
This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.
