Semiconductor Sensors
hardcover
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October 28, 1994
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ISBN-13: 9780471546092
ISBN-10: 0471546097
About this book
Semiconductor Sensors by Sze, Simon M.. hardcover edition. ISBN: 9780471546092.
An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.
