Silicon Processing for the VLSI Era, Vol. 3: The Submicron MOSFET
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January 1, 1994
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ISBN-13: 9780961672157
ISBN-10: 0961672153
About this book
Silicon Processing for the VLSI Era, Vol. 3: The Submicron MOSFET by Wolf, Stanley. hardcover edition. ISBN: 9780961672157.
Volume 3: The Submicron MOSFET. Treats the topics of submicron MOSFET device physics and the relationship between such device physics and submicron MOSFET fabrication. DLC: Integrated circuits - Very large scale.
