Submicron Integrated Circuits
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About this book
Comprehensive treatment of integrated circuits in the submicron range. First chapters cover basic devices used in circuits such as silicon MOSFETs bipolar transistors GaA MESFETs and HEMTs. There is also a chapter on the relatively new GaAs resonant tunneling diode and transistor. Middle chapters address architecture and circuit wiring. Last chapters discuss rapid thermal processing and lithography.
