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Thin Film Processes

hardcover – January 11, 1979
by Werner Kern
$62.75 USD
$62.75 USD
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ISBN-13: 9780127282503 ISBN-10: 0127282505
Publisher
Elsevier
Binding
hardcover
Published
January 11, 1979
Weight
2.1 lbs
Dimensions
24.10×3.20×15.90 cm

About this book

Thin Film Processes by Werner Kern. hardcover edition. ISBN: 9780127282503.

Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process.